Imec Acquires ASML’s High-NA EUV Tool to Advance Next-Gen Chip Production

In Focus

• The ASML EUV machine will enable development of sub‑2 nanometer chips in Europe
• Imec plans to use the tool to give tech companies access to advanced chip equipment
• The Belgian firm is setting up a €2.5 billion NanoIC demonstration facility

Imec, a chip research lab in Belgium has acquired one of the world’s few ASML High‑NA EUV machines at a cost of $400 million. According to Yahoo Finance, Imec’s ASML EUV tool deal is expected to facilitate development of sub‑2 nanometer chips in Europe. The move to secure the lithography machine reinforces Imec’s role in producing next-generation chip technologies.

Imec Plans to Factory-Style Equipment Access

The research lab acquired the High‑NA machine in order to provide shared access to advanced semiconductor equipment in a factory setting. High-NA refers to the machine’s larger numerical aperture, similar to a camera lens.

The technology allows chip features to shrink by up to 66%, an aspect that increases speed and energy efficiency. Leading semiconductor manufacturers plan to use the ASML advanced chipmaking tool in the production of next-generation AI logic chips starting 2027.

Companies such as SK Hynix and Intel also plan to use the High-NA technology to produce high-bandwidth memory chips next year as demand for AI chips soars. Earlier this year, SK Hynix became the sole supplier of advanced memory for Microsoft’s new AI chip, Maia 200. The AI chip is designed to support AI inferencing and can lower the cost of running large language models at scale.

The South Korean company controls 57% of the global HBM market, making it the largest manufacturer of high-bandwidth memory chips. SK Hynix’s HBM chip leadership became apparent last year when it shifted to mass production of its next-generation high-bandwidth memory chips, HBM4.

A Critical Testing Hub for Chip Makers

Imec has entered into bilateral agreements with chip equipment makers, including ASML, Applied Materials, LAM, KLA, and Tokyo Electron. These deals have turned the Belgian firm into a hub where chip manufacturers test, develop, and ensure their next-generation tools work seamlessly together.

Already, Imec is planning to make High-NA technology a critical component of its €2.5 billion NanoIC demonstration facility. The project is supported partially through a €1.4 billion public funding under the EU Chips Act.

Acquisition for the ASML machine “reinforces Europe’s position at the heart of the global semiconductor value chain. It is the core of Europe’s ​strategic autonomy and technological sovereignty,” Imec CEO ‌Luc Van den Hove noted.
Imec’s investment in the chipmaking machine strengthens Europe’s standing in the global semiconductor supply chain and advances the continent’s technological autonomy.

ASML’s Monopoly in the Chip Industry

ASML enjoys a monopoly in the chip equipment industry. It is the only company that makes extreme ultraviolet (EUV) lithography tools, which “print” circuits onto chips. Imec worked with the company to develop the EUV technology.

ASML had announced that its next-generation EUV tool for AI chips was ready for manufacturers to deploy in high-volume production in February 2026. Recently, the Dutch company announced plans to introduce advanced packaging equipment to its portfolio. Chip packaging involves bonding and integrating multiple specialized GPUs into a single system.